The JEOL JSM IT500 scanning electron microscope (SEM) is used for high-resolution imaging and qualitative X-ray microanalysis of conductive and non-conductive samples at a magnification range between x5 and x 20,000.
The JEOL IT500 has two operating modes:
High vacuum mode (pressure range 10-2 - 10-4 Pa)
This is used for high-resolution imaging of conductive samples. 4.0 nm (30 kV BED). Examples of samples examined include metallic, conductive materials, and metal sputter-coated samples.
Low vacuum mode/variable pressure (10-150 Pascals)
This is used for imaging and analysis of non-conductive samples. 3.0 nm (30 kV) 15.0 nm (1.0 kV) resolution. Examples of samples examined include fossilised material, insects, and mineral samples.
- SEM Supporter software for tiling and creating image montages at high resolution, which allows for automated image collection of large areas or multiple areas.
- Large specimen chamber (150 mm diameter x 75 mm high)
- Internal image navigation camera
- Safe specimen height protection
Recent applications
- Fossilled Bryzoans
- Insect specimens from museum collections
- Fossilised crinoids
- Micrometeorites for X-ray microanalysis
- Paint samples from artworks to confirm the authenticity and composition of paintings
About EDX analysis
Energy dispersive X-ray spectroscopy (EDX) is a kind of scanning electron microscopy that involves X-ray micro-analysis. The key features of this technique are:
- Non-destructive qualitative analysis can be carried out for elements with an atomic number greater than five.
- Detection limits are of the order of 0.2 weight per cent, dependent on the type of specimen, elements of interest, etc.
- Analyses can be undertaken in spot mode or the beam can be scanned to acquire X-ray element maps of areas of the sample surface.
- Automated image and elemental analysis can be carried out over large specimen areas using Oxford Instruments INCA software's feature mode.
- Backscattered electron and X-ray element map montages can be acquired and automatically stitched using Oxford Instruments INCA software's montage mode.
Key facts
Techniques: SEM imaging with X-ray microanalysis
Magnification: x5 to x20,000 in high vacuum mode, dependent on sample type and imaging conditions. 50-2,000x in low vacuum mode.
Resolution: 3nm at 30kV, 8nm at 3kV
Image output: 8-bit TIFFs, from 1280 x 960 up to 5120 x 3840 pixels
Electron source: Tungsten filament
Detectors
- Low vacuum Secondary electron detector
- Backscatter electron detector
- Energy dispersive X-ray (EDX) detector (Oxford Instruments X-Max detector)