Electron probe micro-analysis (EPMA)

Instrument: Cameca SX100 Electron Microprobe


  • 5 wavelength dispersive X-ray (WDX) spectrometers
  • Bruker AXS 4010 XFlash silicon drift energy dispersive X-ray (EDX) detector
  • secondary electron detector
  • backscattered electron detector
  • panchromatic cathodoluminescence detector

Key instrument capabilities

This dedicated WDX electron microprobe is capable of unattended overnight elemental analysis of materials in polished sections or blocks.

Images from the sample surface can also be obtained using the secondary and backscattered electron detectors and the panchromatic cathodoluminescence detector.

How it works

Analysis is achieved by focusing a beam of electrons onto the sample surface that produces X-rays with wavelengths or energies characteristic of the elements present.

Quantitative analyses can be obtained for: elements with an atomic number greater than 5 (boron). 

Typical detection limits: in the order of 0.02 wt %.

Contact details

For further information or to arrange to use the instrument contact:

John Spratt
Tel: +44 (0)20 7942 5522
Fax: +44 (0)20 7942 5811

X-ray elemental map of a titanite grain showing distribution of the element niobium
Examples of Cameca SX100 applications

View some examples of how the Cameca SX100 electron microprobe can be used to obtain X-ray elemental maps and true-colour cathodoluminescence images of samples.