Scanning electron microscopy with X-ray analysis

This instrument has a large specimen chamber and is capable of qualitative or quantitative analysis of elements with an atomic number greater than five (boron). The detection limits are of the order of 0.2 per cent for EDX and less for WDX. The energy dispersive X-ray spectrometer is used for qualitative analysis of a very wide range of biological, technological and mineralogical materials, both at high vacuum and in low vacuum mode (typically 20-100 Pascals pressure). It is also calibrated with well-characterised standards for quantitative microanalysis of silicate and sulfide minerals. As well as point analysis, the spectrometer software is routinely used for mapping of the distribution of elements from carbon to uranium, for production of X-ray linescans and automated montages of X-ray maps and electron images.

The wavelength dispersive X-ray spectrometer has four crystals (PC1, TAP, PET and LiF) and is used in recognition of elements for which the INCA EDS may have difficulty in separation of tightly clustered X-ray peaks, for example the lanthanide elements and the first row transition metals.

Examples