Carl Zeiss Ultra Plus Field Emission SEM

Instrument specifications


  • 4-quadrant solid-state backscattered detector (AsB)
  • Conventional secondary electron detector (Everhardt-Thornley)
  • In-lens secondary electron detector
  • In-lens energy and angle selective backscatter detector (EsB)
  • Multi-mode scanning transmission electron microscope (STEM) detector
  • Energy dispersive X-ray (EDX) detector (Oxford instruments X-Max detector)


  • 12 - 1,000,000x  for secondary electron (SE) images
  • 100 - 1,000,000x for backscattered electron (BSE) images

Resolution: 1nm, dependent on working conditions

Image Output: 8-bit and 16-bit TIFFs, up to 3072 x 2304 pixels

Key instrument features

  • Ultra high resolution secondary and backscatter electron imaging, utilising new in-lens detector technology.
  • EsB detector features an integrated filtering grid to enhance image quality. It is less sensitive to edge contrast and charging effects which enables precise imaging and measurement of boundaries, particles, and features.
  • High efficiency in-lens secondary electron detector enables high contrast surface imaging.
  • STEM detector offers bright field and orientated dark field modes, and a carrousel TEM holder taking up to 9 grids.
  • Revolutionary charge compensation system for the imaging of non-conducting samples.
  • Motorized 6-axis super eucentric stage (-4° to 70° tilt), coupled with the SmartSEM image navigation, enables quick and simple sample navigation.
  • EDX analysis

Find out about EDX analysis

Sample preparation

Strict control is maintained over specimen preparation and handling methods since 'dirty' specimens will contaminate the column and degrade the performance of the microscope.

  • Specimens and stubs should only be handled with forceps.
  • Ideally, specimens will be permanently mounted onto stubs using slow-drying araldite or silver dag.
  • Conductive tapes and self-adhesive mounts will not be permitted in this microscope.

Contact details

For further information or to arrange to use the microscopes contact:

Dr Alex Ball
Tel: +44 (0)20 7942 5263
Fax: +44 (0)20 7942 5811

Email Alex Ball

Copper-oxide nanoparticles imaged using the scanning transmission electron microscope detector
Examples of Carl Zeiss Ultra Plus Field Emission SEM applications

View some example images of biological and non-biological specimens obtained using the Ultra Plus scanning electron microscope.

Our scanning electron microscopes