Zeiss Ultra Plus Field Emission SEM
High-resolution SEM with X-ray micro-analysis
Techniques: high-resolution SEM with X-ray micro-analysis
Magnifications: 12-1,000,000x for secondary electron (SE) images, 100-1,000,000x for backscattered electron (BSE) images
Resolution: 1nm, dependent on working conditions
Image output: 8-bit and 16-bit TIFFs, up to 3072 x 2304 pixels
The Ultra Plus scanning electron microscope is suitable for high-resolution imaging of biological and non-biological specimens. The microscope's charge compensation system allows non-conducting samples to be imaged without the need for coating.
Key instrument features
- Ultra high-resolution secondary and backscatter electron imaging, utilising in-lens detector technology.
- Energy selective backscatter detector (EsB) features an integrated filtering grid to enhance image quality. It is less sensitive to edg 1D0A e contrast and charging effects, which enables precise imaging and measurement of boundaries, particles and features.
- High-efficiency in-lens secondary electron detector enables high-contrast surface imaging.
- Scanning transmission electron microscope (STEM) detector offers bright field and orientated dark field modes, and a carousel transmission electron microscope (TEM) holder taking up to nine grids.
- Revolutionary charge compensation system for the imaging of non-conducting samples.
- Motorised six-axis super eucentric stage (-4° to 70° tilt), coupled with Zeiss SmartSEM image navigation, enables quick and simple sample navigation.
- Energy dispersive X-ray (EDX) micro-analysis.
Strict control is maintained over specimen preparation and handling methods since dirty specimens will contaminate the column and degrade the performance of the microsc 12D1 ope.
- Specimens and stubs should only be handled with forceps.
- Ideally, specimens will be permanently mounted onto stubs using slow-drying araldite or silver dag.
- Conductive tapes and self-adhesive mounts will not be permitted on this microscope.
About EDX analysis
Energy dispersive X-ray spectroscopy (EDX) is a kind of scanning electron microscopy that involves X-ray micro-analysis. The key features of this technique are:
- Non-destructive qualitative analysis can be carried out for elements with an atomic number greater than five.
- Detection limits are of the order of 0.2 weight per cent, dependent on the type of specimen, elements of interest, etc.
- Analyses can be undertaken in spot mode or the beam can be scanned to acquire X-ray element maps of areas of the sample surface.
- Automated image and elemental analysis can be carried out over large specimen areas using Oxford Instruments INCA software's feature mode.
- Backscattered electron and X-ray element map montages can be acquired and automatically stitched using Oxford Instruments INCA software's montage mode.
- four-quadrant solid state backscattered detector (AsB)
- conventional secondary electron detector (Everhardt-Thornley)
- in-lens secondary electron detector
- in-lens energy and angle selective backscatter detector (EsB)
- multimode scanning transmission electron microscope (STEM) detector
- energy dispersive X-ray (EDX) detector (Oxford Instruments X-Max detector)